Microsystems Laboratory UC-Berkeley, ME Dept.
Parametric and Optimal Design of MEMS – Class#9 Liwei Lin Professor, Dept. of Mechanical Engineering Co-Director, Berkeley Sensor and Actuator Center The University of California, Berkeley, CA94720 e-mail:
[email protected] http://www.me.berkeley.edu/~lwlin
Liwei Lin, University of California at Berkeley
Outline
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Microsystems Laboratory UC-Berkeley, ME Dept.
General
Solving Procedures for Meandering Flexures Nonlinear Effects of Beams to Systems Sensor Designs
Liwei Lin, University of California at Berkeley
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Meandering Flexure
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Examples
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Solving Processes
Continue on x & y components
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Free-Body Diagram
6/12/00
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Unified Beam Bending Theory
Continue with Beam2, 3 … 7
6/12/00
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Summary
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Matrix to Solve M0 (set 7 = 0)
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Continue: Solution Procedures Please read Professor Pisano’s class notes for detail derivations. In principle, the 51 unknowns can be solved. The values of , x, y on each b beam can b be calculated. l l d One can derive kx & ky 10
Example: ky
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Example: Boundary Conditions
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Example: Fixed-Guided Beam
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Example: Fixed-Guided Beam
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Non-linear Behavior
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Sources of Nonlinearity
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Estimation of Shear Effects
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Width & Thickness Convention
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Beam Curvature
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MEMS Spring Hardening Effect
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MEMS Spring Hardening Effect
Detailed Derivations in the Old lecture notes 21
MSMS Beams – short summary
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MSMS Beam Examples
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6/12/00
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Duffing Equation
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Duffing Equation
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Percentage Nonlinearity
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Resonant Sensor Designs
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Capacitive Gyro Sensors • Simplified Gyro Structure Sense electrode
Drive electrode
Gyro Design • Drive mode Frequency iis F about 9900Hz
Gyro Design • Sense mode Frequency iis F about 10016Hz
